Chemical Composition of an Inductively Coupled Hexamethyldisilazane–Argon Plasma and Properties of Films Grown in this Plasma Full article
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Inorganic Materials
ISSN: 0020-1685 , E-ISSN: 1608-3172 |
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| Output data | Year: 2016, Volume: 52, Number: 6, Pages: 630-636 Pages count : 7 DOI: 10.1134/S0020168516050150 | ||
| Tags | plasma-enhanced chemical vapor deposition, thin films, optical emission spectroscopy | ||
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Abstract:
The simplest components (atoms, diatomic molecules, and simple free radicals) of an inductively coupled rf plasma in a hexamethyldisilazane–argon mixture have been identified by optical emission spectroscopy. We have studied the influence of process conditions (plasma power and hexamethyldisilazane concentration in the mixture) on the intensity of lines and bands corresponding to these components and the corresponding changes in the composition and physicochemical properties of SiCxNyHz films grown in this plasma.
Cite:
Shayapov V.R.
, Chagin M.N.
, Rumyantsev Y.M.
Chemical Composition of an Inductively Coupled Hexamethyldisilazane–Argon Plasma and Properties of Films Grown in this Plasma
Inorganic Materials. 2016. V.52. N6. P.630-636. DOI: 10.1134/S0020168516050150 WOS Scopus РИНЦ OpenAlex
Chemical Composition of an Inductively Coupled Hexamethyldisilazane–Argon Plasma and Properties of Films Grown in this Plasma
Inorganic Materials. 2016. V.52. N6. P.630-636. DOI: 10.1134/S0020168516050150 WOS Scopus РИНЦ OpenAlex
Original:
Шаяпов В.Р.
, Чагин М.Н.
, Румянцев Ю.М.
Химический состав индуктивно-связанной плазмы смеси гексаметилдисилазана с аргоном и свойства пленок, образующихся в такой плазме
Неорганические материалы. 2016. Т.52. №6. С.684-690. DOI: 10.7868/S0002337X16050158 РИНЦ OpenAlex
Химический состав индуктивно-связанной плазмы смеси гексаметилдисилазана с аргоном и свойства пленок, образующихся в такой плазме
Неорганические материалы. 2016. Т.52. №6. С.684-690. DOI: 10.7868/S0002337X16050158 РИНЦ OpenAlex
Dates:
| Submitted: | Sep 14, 2015 |
Identifiers:
| Web of science: | WOS:000376596500018 |
| Scopus: | 2-s2.0-84979586904 |
| Elibrary: | 27096090 |
| OpenAlex: | W2406003768 |