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Demin V.N.
, Borisov V.O.
, Бакланов А.
, Грачев Г.
, Смирнов А.
, Багаев С.
Homogeneous nucleation during laser-plasma-chemical synthesis of SiCN solid coatings from hexamethyldisilazane Technical Physics. 2023. P.804-808. |