Metal β-diketonates as precursors in MOCVD processes: the thermodynamics of their evaporation - Conference attendances

Metal β-diketonates as precursors in MOCVD processes: the thermodynamics of their evaporation Conference attendances

Language

Английский

Participant type

Устный

Conference

ХXIV МЕЖДУНАРОДНАЯ КОНФЕРЕНЦИЯ ПО ХИМИЧЕСКОЙ ТЕРМОДИНАМИКЕ
01-05 Jul 2024 , Иваново

Authors

Makarenko A.M. ¹ , Zherikova K.V. ¹ , Morozova N.B. ¹

Affiliations

1	Nikolaev Institute of Inorganic Chemistry, Siberian Branch of Russian Academy of Sciences

Makarenko A.M. , Zherikova K.V. , Morozova N.B.
Metal β-diketonates as precursors in MOCVD processes: the thermodynamics of their evaporation
ХXIV МЕЖДУНАРОДНАЯ КОНФЕРЕНЦИЯ ПО ХИМИЧЕСКОЙ ТЕРМОДИНАМИКЕ 01-05 Jul 2024