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Metal β-diketonates as precursors in MOCVD processes: the thermodynamics of their evaporation Conference attendances

Language Английский
Participant type Устный
Conference ХXIV МЕЖДУНАРОДНАЯ КОНФЕРЕНЦИЯ ПО ХИМИЧЕСКОЙ ТЕРМОДИНАМИКЕ
01-05 Jul 2024 , Иваново
Authors Makarenko A.M. 1 , Zherikova K.V. 1 , Morozova N.B. 1
Affiliations
1 Nikolaev Institute of Inorganic Chemistry, Siberian Branch of Russian Academy of Sciences
Cite: Makarenko A.M. , Zherikova K.V. , Morozova N.B.
Metal β-diketonates as precursors in MOCVD processes: the thermodynamics of their evaporation
ХXIV МЕЖДУНАРОДНАЯ КОНФЕРЕНЦИЯ ПО ХИМИЧЕСКОЙ ТЕРМОДИНАМИКЕ 01-05 Jul 2024