Comparative study of thermal behavior of a series beta-diketonate precursors for chemical vapor deposition of lithium-containing films Full article
| Journal |
Vacuum
ISSN: 0042-207X , E-ISSN: 1879-2715 |
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| Output data | Year: 2023, Volume: 215, Article number : 112359, Pages count : 9 DOI: 10.1016/j.vacuum.2023.112359 | ||
| Authors |
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| Affiliations |
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Funding (3)
| 1 | Ministry of Science and Higher Education of the Russian Federation | 121031700313-8 |
| 2 | Ministry of Science and Higher Education of the Russian Federation | 121031700314-5 |
| 3 | Russian Science Foundation | 22-23-01034 |
Cite:
Turgambaeva A.E.
, Urkasym kyzy S.
, Korolkov I.V.
, Maksimovskii E.A.
, Syrokvashin M.M.
, Stabnikov P.A.
, Krisyuk V.V.
Comparative study of thermal behavior of a series beta-diketonate precursors for chemical vapor deposition of lithium-containing films
Vacuum. 2023. V.215. 112359 :1-9. DOI: 10.1016/j.vacuum.2023.112359 WOS Scopus OpenAlex
Comparative study of thermal behavior of a series beta-diketonate precursors for chemical vapor deposition of lithium-containing films
Vacuum. 2023. V.215. 112359 :1-9. DOI: 10.1016/j.vacuum.2023.112359 WOS Scopus OpenAlex
Dates:
| Submitted: | May 7, 2023 |
| Published print: | Sep 1, 2023 |
Identifiers:
| Web of science: | WOS:001037981600001 |
| Scopus: | 2-s2.0-85164726247 |
| OpenAlex: | W4382363953 |