Transition from superhydrophilic to superhydrophobic of silicon wafer by a combination of laser treatment and fluoropolymer deposition

Transition from superhydrophilic to superhydrophobic of silicon wafer by a combination of laser treatment and fluoropolymer deposition Full article

Journal

Journal of Physics D: Applied Physics
ISSN: 1361-6463

Output data

Year: 2018, Volume: 51, Number: 25, Article number : 255307, Pages count : 7 DOI: 10.1088/1361-6463/aac641

Authors

Starinskiy Sergey V ^1,2 , Bulgakov Alexander V ^1,3 , Gatapova Elizaveta Ya ^1,2 , Shukhov Yuri G ¹ , Sulyaeva Veronica S ⁴ , Timoshenko Nikolay I ¹ , Safonov Alexey I ¹

Affiliations

1	Kutateladze Institute of Thermophysics SB RAS, Lavrentyev Ave. 1, 630090, Novosibirsk, Russia
2	Novosibirsk State University, Pirogova Str. 2, 630090, Novosibirsk, Russia
3	HiLASE Centre, Institute of Physics of the Czech Academy of Sciences, Za Radnicí 828, 25241 Dolní Břežany, Czech Republic
4	Nikolaev Institute of Inorganic Chemistry SB RAS, Lavrentyev Ave. 3, 630090, Novosibirsk, Russia

Starinskiy S.V. , Bulgakov A.V. , Gatapova E.Y. , Shukhov Y.G. , Sulyaeva V.S. , Timoshenko N.I. , Safonov A.I.
Transition from superhydrophilic to superhydrophobic of silicon wafer by a combination of laser treatment and fluoropolymer deposition
Journal of Physics D: Applied Physics. 2018. V.51. N25. 255307 :1-7. DOI: 10.1088/1361-6463/aac641 WOS Scopus РИНЦ OpenAlex

Submitted:	Feb 27, 2018
Accepted:	May 18, 2018
Published print:	Jun 5, 2018

Web of science:	WOS:000434376000001
Scopus:	2-s2.0-85048306364
Elibrary:	35779107
OpenAlex:	W2803700124

DB	Citing
OpenAlex	22
Web of science	20
Scopus	21
Elibrary	23