Extraordinary synergetic effect of precursors in laser CVD deposition of SiBCN films

Extraordinary synergetic effect of precursors in laser CVD deposition of SiBCN films Full article

Journal

Journal of The European Ceramic Society
ISSN: 0955-2219 , E-ISSN: 1873-619X

Output data

Year: 2019, Volume: 39, Number: 16, Pages: 5123-5131 Pages count : 9 DOI: 10.1016/j.jeurceramsoc.2019.08.006

Authors

Merenkov I.S. ^1,2 , Katsui H. ³ , Khomyakov M.N. ⁴ , Sulyaeva V.S. ¹ , Pushkarev R.V. ¹ , Tu R. ⁵ , Goto T. ^3,5,6 , Kosinova M.L. ¹

Affiliations

1	Nikolaev Institute of Inorganic Chemistry SB RAS, Novosibirsk, 630090, Russia
2	Ural Federal University, Ekaterinburg, 620002, Russia
3	Institute for Materials Research, Tohoku University, Sendai, 980-8577, Japan
4	Institute of Laser Physics SB RAS, Novosibirsk, 630090, Russia
5	Wuhan University of Technology, Wuhan, 430070, China
6	New Industry Creation Hatchery Center, Tohoku University, Sendai, 980-0845, Japan

Merenkov I.S. , Katsui H. , Khomyakov M.N. , Sulyaeva V.S. , Pushkarev R.V. , Tu R. , Goto T. , Kosinova M.L.
Extraordinary synergetic effect of precursors in laser CVD deposition of SiBCN films
Journal of The European Ceramic Society. 2019. V.39. N16. P.5123-5131. DOI: 10.1016/j.jeurceramsoc.2019.08.006 WOS Scopus РИНЦ OpenAlex

Submitted:	May 18, 2019
Accepted:	Aug 5, 2019
Published online:	Aug 6, 2019

Web of science:	WOS:000488140300003
Scopus:	2-s2.0-85070411132
Elibrary:	41676992
OpenAlex:	W2965826810

DB	Citing
OpenAlex	23
Web of science	19
Scopus	19
Elibrary	23