Fluoropolymer coatings deposited on rotating cylindrical surfaces by HW CVD: experiment and simulation

Fluoropolymer coatings deposited on rotating cylindrical surfaces by HW CVD: experiment and simulation Full article

Journal

Journal of Physics D: Applied Physics
ISSN: 1361-6463

Output data

Year: 2021, Volume: 54, Number: 22, Article number : 225204, Pages count : 12 DOI: 10.1088/1361-6463/abe8fd

Authors

Bykov Nikolay Y ^1,2 , Ronshin Fedor V ^3,4 , Safonov Alexey I ^3,4 , Starinskiy Sergey V ^3,4 , Sulyaeva Veronica S ⁵

Affiliations

1	Peter the Great St. Petersburg Polytechnic University, Polytechnicheskaya Street, 29, St. Petersburg 195251, Russia
2	ITMO University, Kronversky pr. 49, St. Petersburg 197101, Russia
3	Kutateladze Institute of Thermophysics SB RAS, Lavrentyev Ave. 1, Novosibirsk 630090, Russia
4	Novosibirsk State University, Pirogova Str. 2, Novosibirsk 630090, Russia
5	Nikolaev Institute of Inorganic Chemistry SB RAS, Lavrentyev Ave. 3, Novosibirsk 630090, Russia

Bykov N.Y. , Ronshin F.V. , Safonov A.I. , Starinskiy S.V. , Sulyaeva V.S.
Fluoropolymer coatings deposited on rotating cylindrical surfaces by HW CVD: experiment and simulation
Journal of Physics D: Applied Physics. 2021. V.54. N22. 225204 :1-12. DOI: 10.1088/1361-6463/abe8fd WOS Scopus РИНЦ OpenAlex

Submitted:	Dec 30, 2020
Accepted:	Feb 23, 2021
Published print:	Mar 15, 2021

Web of science:	WOS:000629138400001
Scopus:	2-s2.0-85103151653
Elibrary:	46784953
OpenAlex:	W3129791562

DB	Citing
OpenAlex	3
Web of science	3
Scopus	3
Elibrary	3