Dielectric layers BCxNy: synthesis by the decomposition of vapors of organoboron compounds, composition and chemical structure

Dielectric layers BCxNy: synthesis by the decomposition of vapors of organoboron compounds, composition and chemical structure Full article

Journal

Journal of Structural Chemistry
ISSN: 1573-8779 , E-ISSN: 0022-4766

Output data

Year: 2021, Volume: 62, Pages: 1631–1647 Pages count : DOI: 10.1134/S0022476621100188

Authors

Sulyaeva V.S. ¹ , Kesler V.G. ² , Kosinova M.L. ¹

Affiliations

1	Nikolaev Institute of Inorganic Chemistry, Siberian Branch of Russian Academy of Sciences
2	Rzhanov Institute of Semiconductors, Siberian Branch of Russian Academy of Sciences

Sulyaeva V.S. , Kesler V.G. , Kosinova M.L.
Dielectric layers BCxNy: synthesis by the decomposition of vapors of organoboron compounds, composition and chemical structure
Journal of Structural Chemistry. 2021. V.62. P.1631–1647. DOI: 10.1134/S0022476621100188 WOS Scopus РИНЦ OpenAlex

Суляева В.С. , Кеслер В.Г. , Косинова М.Л.
Диэлектрические слои BCxNy: синтез разложением паров борорганических соединений, состав и химическое строение
Журнал структурной химии. 2021. Т.62. №10. С.1736-1753. DOI: 10.26902/jsc_id87084 РИНЦ OpenAlex

Accepted:	Apr 18, 2021
Submitted:	Jul 28, 2021
Published print:	Oct 1, 2021

Web of science:	WOS:000719338400018
Scopus:	2-s2.0-85119151209
Elibrary:	47526826
OpenAlex:	W3214149540

DB	Citing
OpenAlex	2
Web of science	2
Scopus	2
Elibrary	1