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Synthesis, Properties and Aging of ICP-CVD SiCxNy:H Films Formed from Tetramethyldisilazane Full article

Journal Coatings
ISSN: 2079-6412
Output data Year: 2022, Volume: 12, Number: 1, Article number : 80, Pages count : 26 DOI: 10.3390/coatings12010080
Authors Chagin Maksim N. 1 , Sulyaeva Veronica S. 1 , Shayapov Vladimir R. 1 , Kolodin Aleksey N. 2 , Khomyakov Maksim N. 3 , Yushina Irina V. 1 , Kosinova Marina L. 1
Affiliations
1 Laboratory of Functional Films and Coatings, Nikolaev Institute of Inorganic Chemistry, SB RAS, 630090 Novosibirsk, Russia
2 Laboratory of Extraction Processes, Nikolaev Institute of Inorganic Chemistry, SB RAS, 630090 Novosibirsk, Russia
3 Laser Plasma Department, Institute of Laser Physics, SB RAS, 630090 Novosibirsk, Russia
Cite: Chagin M.N. , Sulyaeva V.S. , Shayapov V.R. , Kolodin A.N. , Khomyakov M.N. , Yushina I.V. , Kosinova M.L.
Synthesis, Properties and Aging of ICP-CVD SiCxNy:H Films Formed from Tetramethyldisilazane
Coatings. 2022. V.12. N1. 80 :1-26. DOI: 10.3390/coatings12010080 WOS Scopus РИНЦ OpenAlex
Dates:
Submitted: Dec 10, 2021
Accepted: Jan 5, 2022
Published print: Jan 11, 2022
Identifiers:
Web of science: WOS:000747547800001
Scopus: 2-s2.0-85123690053
Elibrary: 48145775
OpenAlex: W4205563622
Citing:
DB Citing
OpenAlex 9
Web of science 5
Scopus 6
Elibrary 4
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