ALD and CVD deposition of pure thin gold films from a stable dimethylgold(III) precursor Full article

Journal	Nanoscale ISSN: 2040-3372 , E-ISSN: 2040-3364
Output data	Year: 2025, Volume: 17, Number: 4, Pages: 2318-2325 Pages count : 8 DOI: 10.1039/d4nr04765f
Authors	Parkhomenko Roman G. 1 , Igumenov Igor K. 2 , Hadjadj Sebastien Elie 3 , Trubin Sergey V. 2 , Knez Mato 1,4
Affiliations	1 CIC NanoGUNE, Tolosa Hiribidea 76, E-20018 San Sebastian, Spain. r.parkhomenko@nanogune.eu. 2 Nikolaev Institute of Inorganic Chemistry SB RAS, Lavrentiev Pr. 3, Novosibirsk 630090, Russia. 3 Materials Physics Center CSIC - UPV/EHU, Manuel de Lardizabal 5, 20018 San Sebastián, Spain. 4 IKERBASQUE, Basque Foundation for Science, Plaza Euskadi 3, Bilbao E-48009, Spain.