Breaking through the Thermodynamics “Wilds” of Metal–Organic Chemical Vapor Deposition Precursors: Metal tris-Acetylacetonates Full article

Journal	Coatings ISSN: 2079-6412
Output data	Year: 2023, Volume: 13, Number: 8, Article number : 1458, Pages count : 17 DOI: 10.3390/coatings13081458
Authors	Makarenko Alexander M. 1 , Trubin Sergey V. 1 , Zherikova Kseniya V. 1
Affiliations	1 Nikolaev Institute of Inorganic Chemistry, Siberian Branch of Russian Academy of Sciences, 630090 Novosibirsk, Russia

Funding (2)

1	Ministry of Science and Higher Education of the Russian Federation	121031700314-5
2	Russian Science Foundation	22-23-20182