Thermodynamic Study of Iridium(I) Complexes as a Basis for Chemical Gas-Phase Deposition Technology Full article
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Russian Journal of General Chemistry
ISSN: 1070-3632 , E-ISSN: 1608-3350 |
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| Output data | Year: 2021, Volume: 91, Pages: 1990–1998 Pages count : DOI: 10.1134/S1070363221100108 | ||
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Abstract:
Experimental data on the saturated vapor pressure and melting of dicarbonyl(hexafluoroacetylacetonato)iridium [Ir(CO)2(hfac)] were obtained. Thermodynamic characteristics of its melting and sublimation were calculated. A unified processing of p‒T dependences, the reduction of sublimation parameters to the standard temperature, and the thermodynamic modeling of the composition of condensed phases in the precursor‒gas‒ reagent system were carried out for three iridium(I) compounds: [Ir(CO)2(hfac)], [Ir(CO)2(acac)], and [Ir(cod)(hfac)] (acac– = acetylacetonate ion, cod = cyclooctadiene-1,3). The results form the basis for selection of a precursor and determination of the optimal deposition conditions for iridium(I)-based coatings.
Cite:
Zherikova K.V.
, Makarenko A.M.
, Karakovskaya K.I.
, Zelenina L.N.
, Sysoev S.V.
, Vikulova E.S.
, Morozova N.B.
Thermodynamic Study of Iridium(I) Complexes as a Basis for Chemical Gas-Phase Deposition Technology
Russian Journal of General Chemistry. 2021. V.91. P.1990–1998. DOI: 10.1134/S1070363221100108 WOS Scopus РИНЦ OpenAlex
Thermodynamic Study of Iridium(I) Complexes as a Basis for Chemical Gas-Phase Deposition Technology
Russian Journal of General Chemistry. 2021. V.91. P.1990–1998. DOI: 10.1134/S1070363221100108 WOS Scopus РИНЦ OpenAlex
Original:
Жерикова К.В.
, Макаренко А.М.
, Караковская К.И.
, Зеленина Л.Н.
, Сысоев С.В.
, Викулова Е.С.
, Морозова Н.Б.
Термодинамическое исследование комплексов иридия(I) как основа технологии химического газофазного осаждения
Журнал общей химии. 2021. Т.91. №10. С.1548–1557. DOI: 10.31857/S0044460X21100103 OpenAlex
Термодинамическое исследование комплексов иридия(I) как основа технологии химического газофазного осаждения
Журнал общей химии. 2021. Т.91. №10. С.1548–1557. DOI: 10.31857/S0044460X21100103 OpenAlex
Dates:
| Published online: | Nov 8, 2021 |
Identifiers:
| Web of science: | WOS:000715802900010 |
| Scopus: | 2-s2.0-85118746316 |
| Elibrary: | 47525370 |
| OpenAlex: | W3211470604 |