TEMPERATURE DEPENDENCES OF THE OPTICAL PROPERTIES AND THE PHASE COMPOSITIONOF VANADIUM DIOXIDE FILMS OBTAINED BY CHEMICAL VAPOR DEPOSITION Full article
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Journal of Structural Chemistry
ISSN: 1573-8779 , E-ISSN: 0022-4766 |
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| Output data | Year: 2017, Volume: 58, Number: 8, Pages: 1515-1521 Pages count : 7 DOI: 10.1134/S0022476617080066 | ||||
| Tags | vanadium dioxide, films, chemical vapor deposition, powder X-ray diffraction analysis, phase transition, optical properties | ||||
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Abstract:
By low pressure chemical vapor deposition single-phase vanadium dioxide films containing monoclinic phase M1from vanadyl acetylacetonate vapor are obtained on monocrystalline silicon Si(100) substrates. Changes in the phase composition of the films on heating to 90 °C are studied by X-ray diffraction. It is found that in the temperature range 60-70 °C the monoclinic phase passes into tetragonal R. At higher temperatures only the tetragonal phase is observed. By reflection spectrophotometry and ellipsometry the temperature dependences of the optical properties of the films exhibiting hysteresis are determined. At wavelengths less than 600 nm the reflection spectra are almost insensitive to temperature variation. After the linear normalization the reflection and extinction coefficients are well consistent with changes in the phase composition.
Cite:
Shayapov V.R.
, Yakovkina L.V.
, Bulina N.V.
, Chernikova N.A.
TEMPERATURE DEPENDENCES OF THE OPTICAL PROPERTIES AND THE PHASE COMPOSITIONOF VANADIUM DIOXIDE FILMS OBTAINED BY CHEMICAL VAPOR DEPOSITION
Journal of Structural Chemistry. 2017. V.58. N8. P.1515-1521. DOI: 10.1134/S0022476617080066 Scopus OpenAlex
TEMPERATURE DEPENDENCES OF THE OPTICAL PROPERTIES AND THE PHASE COMPOSITIONOF VANADIUM DIOXIDE FILMS OBTAINED BY CHEMICAL VAPOR DEPOSITION
Journal of Structural Chemistry. 2017. V.58. N8. P.1515-1521. DOI: 10.1134/S0022476617080066 Scopus OpenAlex
Original:
Шаяпов В.Р.
, Яковкина Л.В.
, Булина Н.В.
, Черникова Н.А.
Температурные зависимости оптических свойств и фазового состава пленок диоксида ванадия, полученных химическим осаждением из газовой фазы
Журнал структурной химии. 2017. Т.58. №8. С.1566-1572. DOI: 10.26902/JSC20170806 OpenAlex
Температурные зависимости оптических свойств и фазового состава пленок диоксида ванадия, полученных химическим осаждением из газовой фазы
Журнал структурной химии. 2017. Т.58. №8. С.1566-1572. DOI: 10.26902/JSC20170806 OpenAlex
Identifiers:
| Scopus: | 2-s2.0-85041560821 |
| OpenAlex: | W2793994989 |