STRUCTURE - THERMAL PROPERTIES RELATIONSHIP IN VOLATILE HETEROMETALLIC COMPLEXES USED IN CVD OF Cu–Pt AND Cu–Pd FILMS

STRUCTURE - THERMAL PROPERTIES RELATIONSHIP IN VOLATILE HETEROMETALLIC COMPLEXES USED IN CVD OF Cu–Pt AND Cu–Pd FILMS Научная публикация

Журнал

Journal of Structural Chemistry
ISSN: 1573-8779 , E-ISSN: 0022-4766

Вых. Данные

Год: 2022, Том: 63, Номер: 7, Страницы: 1070-1078 Страниц : 9 DOI: 10.1134/s0022476622070058

Авторы

Krisyuk V.V. ¹ , Kryuchkova N.A. ¹ , Komarov V.Yu. ¹ , Pishchur D.P. ¹

Организации

1	Nikolaev Institute of Inorganic Chemistry, Siberian Branch, Russian Academy of Sciences, Novosibirsk, Russia

Krisyuk V.V. , Kryuchkova N.A. , Komarov V.Y. , Pishchur D.P.
STRUCTURE - THERMAL PROPERTIES RELATIONSHIP IN VOLATILE HETEROMETALLIC COMPLEXES USED IN CVD OF Cu–Pt AND Cu–Pd FILMS
Journal of Structural Chemistry. 2022. V.63. N7. P.1070-1078. DOI: 10.1134/s0022476622070058 Scopus OpenAlex

Scopus:	2-s2.0-85135187962
OpenAlex:	W4288462126

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