Optical and Mechanical Properties of Films Obtained by Plasma Decomposition of Hexamethyldisilazane Full article
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Russian Journal of Physical Chemistry A
ISSN: 0036-0244 , E-ISSN: 1531-863X |
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| Output data | Year: 2012, Volume: 86, Number: 11, Pages: 1716-1720 Pages count : 5 DOI: 10.1134/S0036024412110258 | ||
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Abstract:
Films of SiCxNyHz composition are obtained by chemical deposition from the vapor phase via the activation of high-frequency discharge plasma (PECVD). The organosilicon compound hexamethyldisilazane, which contains all the atoms needed for the formation of films, is used as our initial material. Physico-chemical properties of the films are studied by spectroscopy of surface acoustic waves, measuring the bending of a film-substrate system, ellipsometry, and infrared spectroscopy. Important features of the films’ structure are established. It is shown that at temperatures of deposition below 400°C, films contain chemical bonds of an organic nature, have very low values of density and the Young modulus, and exhibit high levels of elasticity, indicating their polymer-like structure. It is established that at higher temperatures of deposition, films are inorganic composite materials
Cite:
Shayapov V.R.
, Rumyantsev Y.M.
, Fainer N.I.
, Ayupov B.M.
Optical and Mechanical Properties of Films Obtained by Plasma Decomposition of Hexamethyldisilazane
Russian Journal of Physical Chemistry A. 2012. V.86. N11. P.1716-1720. DOI: 10.1134/S0036024412110258 WOS Scopus РИНЦ OpenAlex
Optical and Mechanical Properties of Films Obtained by Plasma Decomposition of Hexamethyldisilazane
Russian Journal of Physical Chemistry A. 2012. V.86. N11. P.1716-1720. DOI: 10.1134/S0036024412110258 WOS Scopus РИНЦ OpenAlex
Original:
Шаяпов В.Р.
, Румянцев Ю.М.
, Файнер Н.И.
, Аюпов Б.М.
Оптические и механические свойства пленок, полученных плазмохимическим разложением гексаметилдисилазана
Журнал физической химии. 2012. Т.86. №11. С.1841-1846.
Оптические и механические свойства пленок, полученных плазмохимическим разложением гексаметилдисилазана
Журнал физической химии. 2012. Т.86. №11. С.1841-1846.
Dates:
| Submitted: | Jan 24, 2012 |
Identifiers:
| Web of science: | WOS:000309362400014 |
| Scopus: | 2-s2.0-84869007071 |
| Elibrary: | 20490499 |
| OpenAlex: | W2017911612 |