Features of Determination of Thickness of Dielectric Films Obtained in Searching Experiments

Features of Determination of Thickness of Dielectric Films Obtained in Searching Experiments Full article

Journal

Surface investigation: x-ray, synchrotron and neutron techniques
ISSN: 1027-4510 , E-ISSN: 1819-7094

Output data

Year: 2010, Volume: 4, Number: 3, Pages: 452-457 Pages count : 6 DOI: 10.1134/S1027451010030158

Authors

Ayupov B.M. ¹ , Rumyantsev Yu.M. ¹ , Shayapov V.R. ¹

Affiliations

1	Nikolaev Institute of Inorganic Chemistry, Siberian Division, Russian Academy of Sciences, Novosibirsk, Russia

The approach to determination of the thickness and the refractive indices of dielectric films obtained in searching experiments is discussed. Experiments of this kind often exhibit unpredictable values of thickness and refractive indices of films. Nondestructive noncontact methods of spectrophotometry and ellipsometry not involving preliminary preparation of samples are applied. The approach to determination of the thickness and the refractive indices of films is illustrated by means of samples of silicon carbonitride films obtained on silicon substrates by plasma-chemical decomposition of gas-phase trimethyl(phenylamino)silane.

Ayupov B.M. , Rumyantsev Y.M. , Shayapov V.R.
Features of Determination of Thickness of Dielectric Films Obtained in Searching Experiments
Surface investigation: x-ray, synchrotron and neutron techniques. 2010. V.4. N3. P.452-457. DOI: 10.1134/S1027451010030158 WOS Scopus РИНЦ OpenAlex

Аюпов Б.М. , Румянцев Ю.М. , Шаяпов В.Р.
Особенности определения толщины диэлектрических пленок, полученных в поисковых экспериментах
ПОВЕРХНОСТЬ. Рентгеновские синхротронные и нейтронные исследования. 2010. №5. С.100-105.

Web of science:	WOS:000278525400015
Scopus:	2-s2.0-77953503611
Elibrary:	15315905
OpenAlex:	W1992164583

DB	Citing
OpenAlex	6
Scopus	7
Web of science	6
Elibrary	6