Layer exchange during aluminum-induced crystallization of silicon suboxide thin films Full article
Journal |
Materials Letters
ISSN: 1873-4979 , E-ISSN: 0167-577X |
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Output data | Year: 2021, Volume: 293, Article number : 129723, Pages count : DOI: 10.1016/j.matlet.2021.129723 | ||||||||
Authors |
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Affiliations |
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Cite:
Zamchiy A.O.
, Baranov E.A.
, Merkulova I.E.
, Korolkov I.V.
, Vdovin V.I.
, Gutakovskii A.K.
, Volodin V.A.
Layer exchange during aluminum-induced crystallization of silicon suboxide thin films
Materials Letters. 2021. V.293. 129723 . DOI: 10.1016/j.matlet.2021.129723 WOS Scopus РИНЦ OpenAlex
Layer exchange during aluminum-induced crystallization of silicon suboxide thin films
Materials Letters. 2021. V.293. 129723 . DOI: 10.1016/j.matlet.2021.129723 WOS Scopus РИНЦ OpenAlex
Identifiers:
Web of science: | WOS:000686901300018 |
Scopus: | 2-s2.0-85103129731 |
Elibrary: | 6762694 |
OpenAlex: | W3138008543 |