Metal-Organic Chemical Vapor Deposition Precursors: Diagnostic Check for Volatilization Thermodynamics of Scandium(III) β-Diketonates Full article

Journal	Coatings ISSN: 2079-6412
Output data	Year: 2023, Volume: 13, Number: 3, Article number : 535, Pages count : 20 DOI: 10.3390/coatings13030535
Authors	Makarenko Alexander M. 1 , Zaitsau Dzmitry H. 2,3 , Zherikova Kseniya V. 1
Affiliations	1 Nikolaev Institute of Inorganic Chemistry, Siberian Branch of Russian Academy of Sciences, 630090 Novosibirsk, Russia 2 Institute of Technical Thermodynamics, University of Rostock, 18059 Rostock, Germany 3 Competence Centre CALOR of Faculty of Interdisciplinary Research, University of Rostock, 18059 Rostock, Germany

Funding (2)

1	Ministry of Science and Higher Education of the Russian Federation	121031700314-5
2	Russian Science Foundation	22-23-20182