Sciact
  • EN
  • RU

Enhanced Wettability, Hardness, and Tunable Optical Properties of SiCxNy Coatings Formed by Reactive Magnetron Sputtering Full article

Journal Materials
ISSN: 1996-1944
Output data Year: 2023, Volume: 16, Number: 4, Article number : 1467, Pages count : 23 DOI: 10.3390/ma16041467
Authors Sulyaeva Veronica S. 1 , Kolodin Alexey N. 1 , Khomyakov Maxim N. 2 , Kozhevnikov Alexander K. 1 , Kosinova Marina L. 1
Affiliations
1 Nikolaev Institute of Inorganic Chemistry SB RAS, 3, Acad. Lavrentiev Ave., 630090 Novosibirsk, Russia
2 Institute of Laser Physics SB RAS, 15B, Acad. Lavrentiev Ave., 630090 Novosibirsk, Russia

Funding (1)

1 Ministry of Science and Higher Education of the Russian Federation 121031700314-5
Cite: Sulyaeva V.S. , Kolodin A.N. , Khomyakov M.N. , Kozhevnikov A.K. , Kosinova M.L.
Enhanced Wettability, Hardness, and Tunable Optical Properties of SiCxNy Coatings Formed by Reactive Magnetron Sputtering
Materials. 2023. V.16. N4. 1467 :1-23. DOI: 10.3390/ma16041467 WOS Scopus РИНЦ OpenAlex
Dates:
Submitted: Dec 15, 2022
Published print: Feb 9, 2023
Identifiers:
Web of science: WOS:000940093600001
Scopus: 2-s2.0-85149198901
Elibrary: 50368964
OpenAlex: W4319983888
Citing:
DB Citing
OpenAlex 6
Web of science 4
Scopus 3
Elibrary 5
Altmetrics: