Enhanced Wettability, Hardness, and Tunable Optical Properties of SiCxNy Coatings Formed by Reactive Magnetron Sputtering

Enhanced Wettability, Hardness, and Tunable Optical Properties of SiCxNy Coatings Formed by Reactive Magnetron Sputtering Full article

Journal

Materials
ISSN: 1996-1944

Output data

Year: 2023, Volume: 16, Number: 4, Article number : 1467, Pages count : 23 DOI: 10.3390/ma16041467

Authors

Sulyaeva Veronica S. ¹ , Kolodin Alexey N. ¹ , Khomyakov Maxim N. ² , Kozhevnikov Alexander K. ¹ , Kosinova Marina L. ¹

Affiliations

1	Nikolaev Institute of Inorganic Chemistry SB RAS, 3, Acad. Lavrentiev Ave., 630090 Novosibirsk, Russia
2	Institute of Laser Physics SB RAS, 15B, Acad. Lavrentiev Ave., 630090 Novosibirsk, Russia

Funding (1)

Ministry of Science and Higher Education of the Russian Federation

121031700314-5

Sulyaeva V.S. , Kolodin A.N. , Khomyakov M.N. , Kozhevnikov A.K. , Kosinova M.L.
Enhanced Wettability, Hardness, and Tunable Optical Properties of SiCxNy Coatings Formed by Reactive Magnetron Sputtering
Materials. 2023. V.16. N4. 1467 :1-23. DOI: 10.3390/ma16041467 WOS Scopus РИНЦ OpenAlex

Submitted:	Dec 15, 2022
Published print:	Feb 9, 2023

Web of science:	WOS:000940093600001
Scopus:	2-s2.0-85149198901
Elibrary:	50368964
OpenAlex:	W4319983888

DB	Citing
OpenAlex	6
Web of science	2
Scopus	3
Elibrary	2