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Thermodynamics of phase transitions of metal β-diketonates as a basis for controlling their mass transfer in MOCVD processes Conference attendances

Language Английский
Participant type Устный
Conference Международная конференция по химической термодинамике в России
29 Jun - 3 Jul 2026 , Екатеринбург
Authors Makarenko A.M. 1 , Zherikova K.V. 1
Affiliations
1 Nikolaev Institute of Inorganic Chemistry, Siberian Branch of Russian Academy of Sciences
Cite: Makarenko A.M. , Zherikova K.V.
Thermodynamics of phase transitions of metal β-diketonates as a basis for controlling their mass transfer in MOCVD processes
Международная конференция по химической термодинамике в России 29 Jun - 3 Jul 2026