Towards the MOCVD’s paradise: thermodynamics of phase transitions of new scandium precursors

Towards the MOCVD’s paradise: thermodynamics of phase transitions of new scandium precursors Full article

Journal

The Journal of Chemical Thermodynamics
ISSN: 1096-3626 , E-ISSN: 0021-9614

Output data

Year: 2024, Volume: 189, Article number : 107184, Pages count : 8 DOI: 10.1016/j.jct.2023.107184

Tags

Scandium β-diketonate Vapour pressure Standard molar enthalpy and entropy Sublimation Vaporization Melting

Authors

Zherikova Kseniya V. ¹ , Makarenko Alexander M. ¹ , Sartakova Anastasiya V. ^1,2 , Pishchur Denis P. ¹

Affiliations

1	Nikolaev Institute of Inorganic Chemistry, Siberian Branch of Russian Academy of Sciences, Acad. Lavrentiev ave. 3, 630090 Novosibirsk, Russia
2	Novosibirsk State University, Pirogova str., 1, 630090 Novosibirsk, Russia

Scandium complexes with β-diketonate ligands are valuable precursors for the metal–organic chemical vapour deposition (MOCVD) of scandia based materials. The technology has been constantly developing and demanding novel precursors with accurately defined thermal properties, which could be used in MOCVD as well as related gas phase processes. Two new complexes with 1,1-difluoroacetylacetone (dfac) and 5,5,6,6,6-pentafluorohexane-2,4-dione (5Fac) have been synthesized, isolated, and characterized. The volatility and condensed phase behaviour including thermal stability and phase transitions of the obtained compounds have been studied; the saturated vapour pressures over crystalline Sc(dfac)3 and liquid Sc(5Fac)3 complexes have been measured. As a result, the standard molar thermodynamic characteristics of melting, sublimation, and vaporization processes have been calculated. Thermal properties of these compounds have been compared with literature data on scandium(III) β-diketonates already used as MOCVD precursor. These new compounds can be successfully used as precursors in the gas-phase deposition processes, and the set of obtained thermodynamic data can help in choosing the optimal deposition conditions.

Zherikova K.V. , Makarenko A.M. , Sartakova A.V. , Pishchur D.P.
Towards the MOCVD’s paradise: thermodynamics of phase transitions of new scandium precursors
The Journal of Chemical Thermodynamics. 2024. V.189. 107184 :1-8. DOI: 10.1016/j.jct.2023.107184 WOS Scopus РИНЦ OpenAlex

Published print:

Feb 1, 2024

Web of science:	WOS:001102969800001
Scopus:	2-s2.0-85173438098
Elibrary:	65689982
OpenAlex:	W4387328036

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