Modern Solutions for Functional Coatings in CVD Processes Full article

Journal	Coatings ISSN: 2079-6412
Output data	Year: 2022, Volume: 12, Number: 9, Article number : 1265, Pages count : 5 DOI: 10.3390/coatings12091265
Authors	Igumenov Igor K. 1 , Lukashov Vladimir V. 2
Affiliations	1 Nikolaev Institute of Inorganic Chemistry, Siberian Branch Russian Academy of Sciences, 630090 Novosibirsk, Russia 2 Kutateladze Institute of Thermophysics, Siberian Branch Russian Academy of Sciences, 630090 Novosibirsk, Russia

Funding (1)

1

Ministry of Science and Higher Education of the Russian Federation

075-15-2021-575