The comprehensive study of thermal properties of tris(2,2,6,6-tetramethyl-3,5-heptanedionato)cobalt(III) related to the chemical vapor deposition of Co-oxide based thin film materials Full article
| Journal |
Vacuum
ISSN: 0042-207X , E-ISSN: 1879-2715 |
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| Output data | Year: 2022, Volume: 199, Article number : 110969, Pages count : 11 DOI: 10.1016/j.vacuum.2022.110969 | ||
| Authors |
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| Affiliations |
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Funding (1)
| 1 | Ministry of Science and Higher Education of the Russian Federation | 121031700314-5 |
Cite:
Dorovskikh S.I.
, Klyamer D.D.
, Makarenko A.M.
, Zherikova K.V.
, Turgambaeva A.E.
, Shevtsov Y.V.
, Kal’nyi D.B.
, Igumenov I.K.
, Morozova N.B.
The comprehensive study of thermal properties of tris(2,2,6,6-tetramethyl-3,5-heptanedionato)cobalt(III) related to the chemical vapor deposition of Co-oxide based thin film materials
Vacuum. 2022. V.199. 110969 :1-11. DOI: 10.1016/j.vacuum.2022.110969 WOS Scopus РИНЦ OpenAlex
The comprehensive study of thermal properties of tris(2,2,6,6-tetramethyl-3,5-heptanedionato)cobalt(III) related to the chemical vapor deposition of Co-oxide based thin film materials
Vacuum. 2022. V.199. 110969 :1-11. DOI: 10.1016/j.vacuum.2022.110969 WOS Scopus РИНЦ OpenAlex
Dates:
| Submitted: | Sep 16, 2021 |
| Published print: | May 1, 2022 |
Identifiers:
| Web of science: | WOS:000804759100006 |
| Scopus: | 2-s2.0-85125018583 |
| Elibrary: | 48183615 |
| OpenAlex: | W4213290614 |