“Special purpose train” for metal-organic chemical vapor deposition: thermal and thermodynamic properties of indium precursors

“Special purpose train” for metal-organic chemical vapor deposition: thermal and thermodynamic properties of indium precursors Full article

Journal

Thermochimica Acta
ISSN: 1872-762X , E-ISSN: 0040-6031

Output data

Year: 2026, Volume: 765, Article number : 180488, Pages count : 10 DOI: 10.1016/j.tca.2026.180488

Tags

Indium β-diketonate; Vapor pressure; Sublimation and vaporization; Fusion; Standard molar enthalpy; Standard molar entropy

Authors

Sartakova Anastasiya V ¹ , Makarenko Alexander M ¹ , Pishchur Denis P ¹ , Motalov Vladimir B ² , Dunaev Anatoliy M ² , Kolobov Vitaly V ³ , Zherikova Kseniya V ¹

Affiliations

1	Nikolaev Institute of Inorganic Chemistry, Siberian Branch of Russian Academy of Sciences, Acad. Lavrentiev Ave. 3, 630090 Novosibirsk, Russia
2	Department of Physics, Ivanovo State University of Chemistry and Technology, Sheremetevskiy av. 7, Ivanovo, 153000, Russia
3	Federal Research Center Kola Science Center of the Russian Academy of Sciences, Fersman Str. 14, Apatity, 184209, Russia

Funding (1)

Metal β-diketonates are popular metal-organic chemical vapor deposition precursors because of their ability to alter their thermal properties depending on the structure of the terminal substituents. To study the influence of the aromatic group and the number of fluorine atoms in the substituent, indium(III) 1,1-difluoro-2,4-pentanedionate (synthesized for the first time), 1,1,1-trifluoropentane-2,4-dionate, and 1-phenyl-4,4,4-trifluorobutane-1,3-dionate have been obtained and characterized. The volatility of these complexes has been investigated using Knudsen effusion mass spectrometry and the transpiration technique. The condensed-phase thermal behavior, including the fusion process and stability, have been studied using differential scanning calorimetry and simultaneous thermal analysis for these compounds, as well as for indium pentane-2,4-dionate for comparison. Based on these results, the thermodynamic characteristics of fusion and sublimation have been obtained and referenced to 298.15 K. A comparison with literature data has been carried out.

Sartakova A.V. , Makarenko A.M. , Pishchur D.P. , Motalov V.B. , Dunaev A.M. , Kolobov V.V. , Zherikova K.V.
“Special purpose train” for metal-organic chemical vapor deposition: thermal and thermodynamic properties of indium precursors
Thermochimica Acta. 2026. V.765. 180488 :1-10. DOI: 10.1016/j.tca.2026.180488

Submitted:	Jul 24, 2026
Accepted:	Sep 12, 2026
Published online:	Sep 19, 2026
Published print:	Nov 2, 2026

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