Thermal Behavior of Mixtures of Zirconium(IV) and Yttrium(III) Dipivaloylmethanates

Thermal Behavior of Mixtures of Zirconium(IV) and Yttrium(III) Dipivaloylmethanates Full article

Journal

Russian Journal of Applied Chemistry
ISSN: 1608-3296 , E-ISSN: 1070-4272

Output data

Year: 2021, Volume: 94, Number: 4, Pages: 450-456 Pages count : 7 DOI: 10.1134/S1070427221040042

Tags

zirconium dipivaloylmethanate, yttrium dipivaloylmethanate, MOCVD precursors, thermal properties

Authors

Turgambaeva A.E. ¹ , Zherikova K.V. ¹ , Mosyagina S.A. ^1,2 , Krisyuk V V.V. ¹ , Lukashov V.V. ^1,3 , Igumenov I.K. ¹

Affiliations

1	Nikolaev Institute of Inorganic Chemistry, Siberian Branch, Russian Academy of Sciences
2	Novosibirsk State University
3	Kutateladze Institute of Thermal Physics, Siberian Branch, Russian Academy of Sciences

The thermal properties of individual precursors, zirconium(IV) and yttrium(III) dipivaloylmethanates, and of their mixtures [Zr(thd)4–Y(thd)3, Hthd = 2,2,6,6-tetramethylheptane-3,5-dione] used for preparing mixed oxide fi lms by chemical vapor deposition were studied in the condensed and gas phases. In the condensed phase, the vaporization rate of both individual compounds and their mixtures considerably exceeds the decomposition rate. The vaporization, thermal stability of the vapors, and thermal decomposition of the compounds in a vacuum and in the presence of oxygen were studied using mass-spectrometric monitoring of the gas phase composition. Comparison of the thermal behavior of individual Zr(thd)4 and Y(thd)3, heated in separate vaporizers of the mass spectrometer inlet system, and of their mixtures with diff erent Zr(thd)4 to Y(thd)3 ratios reveals no chemical interaction between the precursors in the examined temperature interval.

Turgambaeva A.E. , Zherikova K.V. , Mosyagina S.A. , Krisyuk V V.V. , Lukashov V.V. , Igumenov I.K.
Thermal Behavior of Mixtures of Zirconium(IV) and Yttrium(III) Dipivaloylmethanates
Russian Journal of Applied Chemistry. 2021. V.94. N4. P.450-456. DOI: 10.1134/S1070427221040042 WOS Scopus

Тургамбаева А.Е. , Жерикова К.В. , Мосягина С.А. , Крисюк В.В. , Лукашов В.В. , Игуменов И.К.
ТЕРМИЧЕСКОЕ ПОВЕДЕНИЕ СМЕСЕЙ ДИПИВАЛОИЛМЕТАНАТА ЦИРКОНИЯ(IV) И ДИПИВАЛОИЛМЕТАНАТА ИТТРИЯ(III)
Журнал прикладной химии. 2021. Т.94. №4. С.453-460. DOI: 10.31857/S0044461821040046 РИНЦ OpenAlex

≡ Web of science:	WOS:000662894500004
≡ Scopus:	2-s2.0-85108187017