Thermal decomposition of trimethylamine borane as a precursor to nanocrystalline CVD BCxNy films

Thermal decomposition of trimethylamine borane as a precursor to nanocrystalline CVD BCxNy films Научная публикация

Журнал

Inorganic Materials
ISSN: 0020-1685 , E-ISSN: 1608-3172

Вых. Данные

Год: 2011, Том: 47, Номер: 11, Страницы: 1199-1204 Страниц : 6 DOI: 10.1134/s0020168511100128

Авторы

Korobeinichev O.P. ¹ , Shmakov A.G. ¹ , Chernov A.A. ¹ , Kosinova M.L. ² , Sulyaeva V.S. ² , Kuznetsov F.A. ²

Организации

1	Institute of Chemical Kinetics and Combustion, Siberian Branch, Russian Academy of Sciences, Institutskaya ul. 3, Novosibirsk, 630090 Russia
2	Nikolaev Institute of Inorganic Chemistry, Siberian Branch, Russian Academy of Sciences, pr. Akademika Lavrent’eva 3, Novosibirsk, 630090 Russia

Korobeinichev O.P. , Shmakov A.G. , Chernov A.A. , Kosinova M.L. , Sulyaeva V.S. , Kuznetsov F.A.
Thermal decomposition of trimethylamine borane as a precursor to nanocrystalline CVD BCxNy films
Inorganic Materials. 2011. V.47. N11. P.1199-1204. DOI: 10.1134/s0020168511100128 WOS Scopus РИНЦ OpenAlex

Поступила в редакцию:	14 февр. 2011 г.
Опубликована в печати:	1 нояб. 2011 г.

Web of science:	WOS:000296740200006
Scopus:	2-s2.0-80053947723
РИНЦ:	18008953
OpenAlex:	W2071875297

БД	Цитирований
OpenAlex	2
Web of science	2
Scopus	2
РИНЦ	2