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Synthesis and optical properties of BCxNy films deposited from N-triethylborazine and hydrogen mixture Full article

Journal Thin Solid Films
ISSN: 1879-2731 , E-ISSN: 0040-6090
Output data Year: 2015, Volume: 581, Pages: 59-64 Pages count : 6 DOI: 10.1016/j.tsf.2014.12.002
Authors Sulyaeva Veronica S. 1 , Rumyantsev Yurii M. 1 , Kesler Valerii G. 2 , Kosinova Marina L. 1
Affiliations
1 Department of Functional Materials Chemistry, Nikolaev Institute of Inorganic Chemistry, SB RAS, 630090 Novosibirsk, Russia
2 Laboratory of Physical Principles for Integrated Microelectronics, Rzhanov Institute of Semiconductor Physics, SB RAS, 630090 Novosibirsk, Russia
Cite: Sulyaeva V.S. , Rumyantsev Y.M. , Kesler V.G. , Kosinova M.L.
Synthesis and optical properties of BCxNy films deposited from N-triethylborazine and hydrogen mixture
Thin Solid Films. 2015. V.581. P.59-64. DOI: 10.1016/j.tsf.2014.12.002 WOS Scopus РИНЦ OpenAlex
Dates:
Published online: Dec 8, 2014
Identifiers:
Web of science: WOS:000352223900011
Scopus: 2-s2.0-84926254514
Elibrary: 24048293
OpenAlex: W1988965360
Citing:
DB Citing
OpenAlex 20
Web of science 20
Scopus 19
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