Synthesis and optical properties of BCxNy films deposited from N-triethylborazine and hydrogen mixture

Journal

Thin Solid Films
ISSN: 1879-2731 , E-ISSN: 0040-6090

Output data

Year: 2015, Volume: 581, Pages: 59-64 Pages count : 6 DOI: 10.1016/j.tsf.2014.12.002

Authors

Sulyaeva Veronica S. ¹ , Rumyantsev Yurii M. ¹ , Kesler Valerii G. ² , Kosinova Marina L. ¹

Affiliations

1	Department of Functional Materials Chemistry, Nikolaev Institute of Inorganic Chemistry, SB RAS, 630090 Novosibirsk, Russia
2	Laboratory of Physical Principles for Integrated Microelectronics, Rzhanov Institute of Semiconductor Physics, SB RAS, 630090 Novosibirsk, Russia

Sulyaeva V.S. , Rumyantsev Y.M. , Kesler V.G. , Kosinova M.L.
Synthesis and optical properties of BCxNy films deposited from N-triethylborazine and hydrogen mixture
Thin Solid Films. 2015. V.581. P.59-64. DOI: 10.1016/j.tsf.2014.12.002 WOS Scopus РИНЦ OpenAlex

Published online:

Dec 8, 2014