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Direct liquid injection chemical vapor deposition of ZrO2 films from a heteroleptic Zr precursor: interplay between film characteristics and corrosion protection of stainless steel Full article

Journal Journal of materials research and technology
ISSN: 2238-7854 , E-ISSN: 2214-0697
Output data Year: 2021, Volume: 13, Pages: 1599-1614 Pages count : 16 DOI: 10.1016/j.jmrt.2021.05.068
Authors Beer Sebastian M.J. 1 , Samelor Diane 2 , Abdel Aal Alsayed 3 , Etzkorn Johannes 3 , Detlef Rogalla 4 , Turgambaeva Asiya E. 5 , Esvan Jerome 2 , Kostka Aleksander 6 , Vahlas Constantin 2 , Devi Anjana 1
Affiliations
1 Inorganic Materials Chemistry, Ruhr University Bochum, Universitätsstr. 150, 44801 Bochum, Germany
2 CIRIMAT-CNRS, Universite de Toulouse
3 Chemistry and Materials Engineering, Fachhochschule Dortmund
4 RUBION, Ruhr University Bochum, Universitätsstr. 150, 44801 Bochum, Germany
5 Nikolaev Institute of Inorganic Chemistry SB RAS
6 Center for Interface Dominated Materials (ZGH), Ruhr University Bochum, Universitätsstr. 150, 44801 Bochum, Germany
Cite: Beer S.M.J. , Samelor D. , Abdel Aal A. , Etzkorn J. , Detlef R. , Turgambaeva A.E. , Esvan J. , Kostka A. , Vahlas C. , Devi A.
Direct liquid injection chemical vapor deposition of ZrO2 films from a heteroleptic Zr precursor: interplay between film characteristics and corrosion protection of stainless steel
Journal of materials research and technology. 2021. V.13. P.1599-1614. DOI: 10.1016/j.jmrt.2021.05.068 WOS OpenAlex
Identifiers:
Web of science: WOS:000677663100002
OpenAlex: W3169917145
Citing:
DB Citing
Web of science 19
OpenAlex 19
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