Investigation of charge transfer interaction in heterometallic precursors to control their surface reactivity for MOCVD of Pd-Cu alloy films

Investigation of charge transfer interaction in heterometallic precursors to control their surface reactivity for MOCVD of Pd-Cu alloy films Научная публикация

Журнал

Applied Surface Science
ISSN: 1873-5584 , E-ISSN: 0169-4332

Вых. Данные

Год: 2021, Том: 547, Номер статьи : 149068, Страниц : DOI: 10.1016/j.apsusc.2021.149068

Авторы

Krisyuk Vladislav V. ¹ , Kryuchkova Natalia A. ¹ , Stadnichenko Andrey I. ² , Syrokvashin Mikhail M. ¹

Организации

1	Nikolaev Institute of Inorganic Chemistry, Siberian Branch of the Russian Academy of Sciences, Novosibirsk, Russia
2	Boreskov Institute of Catalysis Siberian Branch of the Russian Academy of Sciences, Novosibirsk, Russia

Krisyuk V.V. , Kryuchkova N.A. , Stadnichenko A.I. , Syrokvashin M.M.
Investigation of charge transfer interaction in heterometallic precursors to control their surface reactivity for MOCVD of Pd-Cu alloy films
Applied Surface Science. 2021. V.547. 149068 . DOI: 10.1016/j.apsusc.2021.149068 Scopus OpenAlex

Scopus:	2-s2.0-85100381211
OpenAlex:	W3122593882

БД	Цитирований
Scopus	4
OpenAlex	5