Thermal properties of indium tris-dipivaloylmethanate as a volatile precursor for indium oxide materials Full article
Journal |
Vacuum
ISSN: 0042-207X , E-ISSN: 1879-2715 |
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Output data | Year: 2022, Volume: 197, Article number : 110856, Pages count : 8 DOI: 10.1016/j.vacuum.2021.110856 | ||||
Authors |
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Affiliations |
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Cite:
Vikulova E.S.
, Turgambaeva A.E.
, Rogov V.A.
, Nazarova A.A.
, Zherikova K.V.
, Korolkov I.V.
, Morozova N.B.
, Zelenina L.N.
Thermal properties of indium tris-dipivaloylmethanate as a volatile precursor for indium oxide materials
Vacuum. 2022. V.197. 110856 :1-8. DOI: 10.1016/j.vacuum.2021.110856 WOS Scopus РИНЦ OpenAlex
Thermal properties of indium tris-dipivaloylmethanate as a volatile precursor for indium oxide materials
Vacuum. 2022. V.197. 110856 :1-8. DOI: 10.1016/j.vacuum.2021.110856 WOS Scopus РИНЦ OpenAlex
Dates:
Published print: | Mar 1, 2022 |
Identifiers:
Web of science: | WOS:000747123700006 |
Scopus: | 2-s2.0-85122503634 |
Elibrary: | 47906594 |
OpenAlex: | W4200274262 |