Thermal properties of indium tris-dipivaloylmethanate as a volatile precursor for indium oxide materials

Thermal properties of indium tris-dipivaloylmethanate as a volatile precursor for indium oxide materials Full article

Journal

Vacuum
ISSN: 0042-207X , E-ISSN: 1879-2715

Output data

Year: 2021, Volume: 197, Article number : 110856, Pages count : DOI: 10.1016/j.vacuum.2021.110856

Authors

Vikulova Evgeniia S. ¹ , Turgambaeva Asiya E. ¹ , Rogov Vladimir A. ² , Nazarova Anna A. ¹ , Zherikova Kseniya V. ¹ , Korolkov Ilya V. ¹ , Morozova Natalia B. ¹ , Zelenina Ludmila N. ¹

Affiliations

1	Nikolaev Institute of Inorganic Chemistry, Siberian Branch of Russian Academy of Sciences, Acad. Lavrentiev Ave 3, 630090, Novosibirsk, Russia
2	Novosibirsk State University, Pirogova Street 2, 630090, Novosibirsk, Russia

Vikulova E.S. , Turgambaeva A.E. , Rogov V.A. , Nazarova A.A. , Zherikova K.V. , Korolkov I.V. , Morozova N.B. , Zelenina L.N.
Thermal properties of indium tris-dipivaloylmethanate as a volatile precursor for indium oxide materials
Vacuum. 2021. V.197. 110856 . DOI: 10.1016/j.vacuum.2021.110856 WOS Scopus РИНЦ OpenAlex

Web of science:	WOS:000747123700006
Scopus:	2-s2.0-85122503634
Elibrary:	47906594
OpenAlex:	W4200274262

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