Scanning probe microscopy and nanoindentation studies of silicon carbonitride films obtained by PECVD from hexamethyldisilazane

Scanning probe microscopy and nanoindentation studies of silicon carbonitride films obtained by PECVD from hexamethyldisilazane Full article

Journal

Письма о материалах
ISSN: 2218-5046

Output data

Year: 2014, Volume: 4, Number: 2, Pages: 114-116 Pages count : 3

Tags

PECVD, silicon carbonitride, roughness, hardness, Young’s modulus

Authors

Shayapov V.R. ¹ , Khomyakov M.N. ^2,3 , Rumyantsev Yu.M. ¹

Affiliations

1	Nikolaev Institute of Inorganic Chemistry, Acad. Lavrentiev Ave 3, 630090, Novosibirsk, Russia
2	Institute of Laser Physics, Acad. Lavrentiev Ave 13 / 3, 630090, Novosibirsk, Russia
3	Novosibirsk State University, Pirogova St. 2, 630090, Novosibirsk, Russia

Silicon carbonitride films were deposited by PECVD from hexamethyldisilazane. To investigate their surface and to determine the parameters of roughness, scanning probe microscopy was applied. Mechanical properties of the films (hardness, Young’s modulus and elastic recovery) were studied by nanoindentation method. It has been found out that hardness and Young’s modulus increase along with the growth of deposition temperature. Elastic recovery is close to 100 % at low deposition temperature (lower than 250 °C) and decreases with the rise of synthesis temperature. The results are explained by an increase in concentration of covalent bonds and other changes in chemical and phase composition.

Shayapov V.R. , Khomyakov M.N. , Rumyantsev Y.M.
Scanning probe microscopy and nanoindentation studies of silicon carbonitride films obtained by PECVD from hexamethyldisilazane
Письма о материалах. 2014. V.4. N2. P.114-116. РИНЦ

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